3D isotropic microfabrication in glass using spatiotemporal focusing of femtosecond laser pulses

Femtosecond (fs) laser direct writing (FLDW) is a laser micro/nano manufacturing technology that can focus the laser pulses on the surface or inside the material, causing local changes in material properties through nonlinear laser-material interactions, which has been widely used in many fields such as micro/nano photonics, integrated optics, microfluidics. Conventional FLDW has the problem of asymmetric lateral and axial fabrication resolution, the axial resolution is significantly elongated, which limit the application of femtosecond lasers in 3D processing.